Monolithic integrated memory array structure including fabrication and package therefor



A I-iI 21.1910

BfAGUS TA ETAL Filed March 31, 1966 FABRICATION AND PACKAGE THEREFOR 23 Sheets-Sheet 1 FIG. I

I i FORM ssmppuoucroa WAFER REOXIDIZE WAFER ORM METAL INTERCONNEC- OF P' TYPE convucnvnv SURFACE nous AND oumc comers I MASK AND HIGH HOLES m I L'g OXIDE LAYER ABOVE APPLY SPUTTERED EPITAXIALLYGROWN REGIONS OXIDE OVERCOAT MASK AND ETCH HOLES IN OXIDE LAYER DIFFUSE PTYPE BASE,

DIODE,AND RESISTOR REGIONS INTO ISOLATED EPITAXIALLY GROWN REGIONS MASX AND ETCH TERMINAL HOLES IN SPUTTERED OXIDE OVERCOAT LAYER FORM N REGIONS IN THE WAFER SURFACE BY DIFFUSION OXIDIZE WAFER SURFACE TO CREATE DEPRESSION ABOVE N REGIONS REMOVE OXIDE LAYER EPITAXIALLY GROW A LAYER OF N TYPE MATERIAL ON THE WAFER SURFACE AND ON THE N* REGIONS OXIDIZE SURFACE OF EPITAXIALLY GROWN LAYER MASK AND ETCH A NETWORK OF CHANNELS IN THE OXIDE SLAYER EXPOSING THE SEMI- CONDUCTOR SURFACE OXIDIZE SURFACE AND DRIVE IN IMPURITIES FORMING THE BASE,DIODE,AND RESISTOR REGIONS I MASK AND ETCH HOLES IN OXIDE LAYER ABOVE BASE REGIONS DIFFUSE IN N TYPE IMPU- RITIES TO FORM EMITTER REGIONS WITHIN THE BASE REGIONS I OXIDIZE SURFACE AND DRIVE IN IMPURITIES FORMING THE EMITTER REGIONS EVAPORATE GOLD ONTO EX- POSED SEMICONDUCTOR SURFACE AND DIFFUSE GOLD INTO WAFER IN NONOXIDIZING ATMOSPHERE EVAPORATE CR, CU, AND AU INTO TERMINAL HOLES EVAPORATE OVERSIZE PB-SN PADS ONTO CR,CU,AU LAND PORTIONS DICE WAFER INTO CIIIPS APPLY MONOLITHIC INTEGRATED CHIPS ON PRIN- TED LAND PATTERNS ON CERAMIC SUBSTRATE MASK AND ETCH HOLES IN OXIDE LAYER FOR FORMING CONTACTS TO DESIRED SEMI- CONDUCTOR REGIONS BY UM TTORNEY April 21, 1970 AGUSTA ETAL 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 23 Sheets-Sheet 2 April 21, 1970 AGUSTA ETAL MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 51, .1966

23 Sheets-Sheet 3 23 Sheets-Sheet 5 B AGUSTA ET AL FABRICATION AND PACKAGE THEREFOR MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING STEP 1 STEP 2 STEP 3 N+ P.- STEP 4 P- A STEP 5 A ya-i121, 1970 Filed March 31. 19 66 STEP 8 b STEP s m P... STEP 7 A April 21, 1-970 5, U A ETAL 3,508,209

:MONOLI'THIG INTEGRATEDMEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March. :31, 1966 25 Sheets-Sheet 6 FIG. IG FIG. 36

" "ISSUE COMPLETE ALL DIFFUSION AND ssmcououcmn DEVICES m OXIDATION OPERATIONS EXCEPT A MONOLITHIC SEMICONDUCTOR smucrum: FOR Hm DIFFUS'ON TO FORM ACTIVE AND/ OR PASSIVE DEVICES IN A MONOLITHIC SEMICONDUCTOR STRUCTURE FORM THE FINAL OXIDE LAYER ON THE SURFACE OF THE MONOLITHIC SEMICONDUCTOR STRUCTURE REMOVE A SELECTED PORTION OF THE FINAL OXIDE LAYER TO EXPOSE SEMICONDUCTOR SURFACE REMOVE A SELECTED PORTION OF THE FINAL OXIDE LAYER TO EXPOSE A SURFACE PORTION OF THE SEMICONDUCTOR STRUCTURE DIFFUSE CARRIER LIFETIME KILLERS INTO SEMICONDUCTOR STRUCTURE THROUGH THE EXPOSED SURFACE IN A NON-OXIDIZINC DIFFUSE CARRIER ATMOSPHERE LIFETIME KILLERS INTO THE EXPOSED SEMICONDUCTOR SURFACE IN A NON-'OXIDIZINC ATMOSPHERE l PERFORM FINAL DIFFUSION I I I OPERATION TO FORM DESIRED PERM" I NEAL SEMICONDUCTOR DEVICES WITHOUT A l I I OPERATION TO INCREASE THE Hm OXIDATION STEP CURRENT CAIN OF THE ACTIVE DEVICES TOTAL CARRIER LIFETIME KILLER DIFFUSION TIME (INCLUDING FURNACE RECOVERY TIME) TIME TE" 5(MIN) ZOIMINI SOIMIN) SOIMIN) 970,0 503 40-5013 IS-ITB I6-I7r lO-IIr 85-91 I0O0C m8? 25-553 IS-ZSB FIG. 26

A ril 21,1970

FABRICATION AND PACKAGE THEREFOR 23 Sheets-Sheet 7 Filed March 31, 1966 FIGJT Flllll FIG.6A

WORD LINE April 21, 1970 UsT ETAL MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 23 Sheets-Sheet 8 Judi April 21, 1910 B, AGUSTA ETAL 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 25 Sheets-Sheed 9 Apnl 21, 1970 AGUSTA ET AL 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 25 Sheets-Sheet 1o FIG.3

A ril 21, 1970 3,508,209 LUDILNG B. AGUSTA ETAL FABRICATION AND PACKAGE THEREFOR 23 Sheets-Sheet 11 Filed March 31, 1966 'FIG.4

4 e m w T T U U C U 3 C7 CH .6 m P I I II LIII I I IIII IIII 4/ I.] n 2 n 6 w 1 T L 1|| U U U U m 1 5 fi FIIMLIIIRII LII L m Y Y I GND FIG.5

DIAGONAL IMAGE (WORD) HORIZONTAL PLANE VERTICAL PLANE MIRROR IMAGE (WORD) MIRROR IMAGE (WORD) OBJECT (WORD) April 21, 1970 B, GU T ET AL- 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 23 Sheets-Sheet 12 m DJ 3 a 0 U g E g 1 2 1 g 20 i E 3 a 2 a U, s

J 3 3 k 8 a A J o g 5 2 z g 2 F N $2 (9 LL Ll.

T T w\,

Ema o (O g-4 |l 9 l wv LL an m J 1- r--| April 21', 1970 5, us ETAL 3,508,209 MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 23 Sheets-Sheet, 13

a v E I a i I F I I I] I s 5 g P w 8 w I I I I E; 7 co g Y s :5; m I I I I E; as: IIIIIIIIII g LL 5% 5 g 2% U3 5 3 E a g m 5 Ll-I E Q 8 E g B, G ST ET AL 3,508,209 MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR 23 Sheets-Sheet. 14.

April 21, 1970 Filed March 31, 1966 EE: 22 205%: 12 a; 223: E55 ms; 5; 32 :22 (on? $9 22 E2: 09 22 E; I I I I I I I Ikfl II I I I I I V5: VIQEA a: v5: l I I I I l I I I III- I I .l l E l l l I I I L52. I I A l I 1% a; a; I I I 087. I I I 502 I I I I I I I I l I I I I I I I I I I I .n n. .u u. I I I I I I I I H n I H .H I v I i I II I I II I I I I I I I I I Y n V QOQA 32 A 22% -52 2 H H H H s2 09 2: E as :2 Z- 89 22 5o? H02 .52: 02 52: o 52: 9:: we: m5: 0:: m5: A! UK I 0E April 21, 1970: Y AGUSTA ETAL 3,508,209

. MONOL'ITHIC INTEGRATED MEMORY ARRAY STRUCT CLUDING R 23 Sheets-Sheet 1 5 Filed March 31, 1966 \wwz 855G 18 12:

im m: 35m; H

q M N vim?? u Illl M HMW JQQN 442. 28. M M. P d oN I H uw mu r" M M r m M .B. AGUSTA ET AL April 21, 1970' MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 25 Sheets-Sheet 16' @OGQO ECG g A 2: 2w m1 :2 a;

April 21, 1970 AGUSTA ETAL 3,508,209

NC CLITEIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 23 Sheets-Sheet 1') mp- V,

E 2' H- "ER-R,

cR-cu-Au CHIP V'I:AIEJFMASK PB-SN PAD MASK1 'M. I

Fl G. I?

PB-SN PAD MASK CR-CU-AU CHiP LAND MASK April 21, 1970 Q .A STA 5 209 B ETAL MONOLITHIC INTEGRATED O RRAY UCTURE IN UDI FABRICATION AND KAGE REFOR I Filed March 61, 1966 25 Sheets-Sheet l8 Fl G": 19

April 21, 1970 I U A ETAL I 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 51; 1966 23 Sheets-Sheet l9 April 21', 1970 AGUSTA ET AL 3,508,209

MONOLITHIC INTEGRATED MEMORY ARRAY STRUCTURE INCLUDING FABRICATION AND PACKAGE THEREFOR Filed March 31, 1966 '23 Sheets-Sheet 2O FIG.19L 

